Exciting Possibilities of Soft X-ray Emission Spectroscopy as Chemical State Analysis in EPMA and FESEM
نویسندگان
چکیده
A novel wavelength dispersive soft X-ray emission spectrometer (WD-SXES) has been developed. It covers nominally the X-ray energy range between 50 and 210 eV [1, 2]. One of the characteristic features of the WD-SXES is parallel detection of the signal so that it can be used like a conventional energy dispersive spectrometer. One other feature is a high energy resolution, which is about 0.2 eV. This resolution is comparable to the one acquired with X-ray photoelectron spectroscopy or electron energy loss spectroscopy. This feature enables us to obtain various information about chemical bonding in bulk samples from observed spectra with a high energy resolution.
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